JEOL2010FMANUAL
Quickchecklist
1.Checktheacceleratingvoltage,mustbeat200kV(rightscreen),HT(μA)(leftpanel)at
0.96-0.97andEmission(leftpanel)at155-160.
2.Checkthevacuumsequence(leftdrawer),V17,V13,V5BandV2on.Vacuummeasured
onSIP(SIPunit,secondvacuummeterfromthetop)mustbebetterthan2x10-5Pa(blue
numbers,150l/s).Thevacuuminthegun(SIPunit,vacuummeteratthetop)mustbebetter
thanx10-6Pa.
3.Ifneeded,fillthereservoirwithLN2.Besurethattheviewingscreencoverisonbefore
fillingthetrap.
4.InsertspecimenholderintoTEM(Insertholderinairlock,setair/pumpswitchtopump
(yellowlightturnsON),whengreenlightturnsON,rotatefullyclockwiseintwostagesand
pushincompletely)
5.Checkthevacuumsequenceagain,(leftdrawer),V17,V13,V5B,V8,V21andV2on.
VacuummeasuredonSIP(SIPunit,secondvacuummeterfromthetop)mustbebetterthan2
x10-5Pa(bluenumbers,150l/s).Thevacuuminthegun(SIPunit,vacuummeteratthetop)
mustbebetterthanx10-6Pa.
6.Ifvacuumisok,openthevalvebetweenthecolumnandthegunbyclickingbutton
VALVE(leftpanelcontrols).
7.Ifneeded,alignthemicroscope.Work!
1.Initialcheck
1.Checkthevacuumsequence(leftdrawer),V17,V13,V5BandV2on.Vacuum
measuredinSIP(SIPunit,secondvacuummeterfromthetop)mustbebetterthan2x
-5Pa(bluenumbers,150l/s).Thevacuuminthegun(SIPunit,vacuummeteratthe
10
top)mustbebetterthanx10-6Pa.
2.Checkthecoolingwaterflowmetersonthebackwallinthemaintenanceroom.
3.Ifneeded,filltheanti-contaminationdevice(ACD)(coldtrap)withLN2.Besurethat
theviewingscreencoverisonbeforefillingthetrap.
4.Caution:TheDewarshouldbere-filledevery4-6hours.
2.InsertingthespecimenholderintheTEMcolumn
Loadthesample
?UseGloves!Lo