基本信息
文件名称：国外经典MEMS课件.pdf
文件大小：1.11 MB
总页数：18 页
更新时间：2025-06-06
总字数：约5.66千字
文档摘要
AnIntroductionofMEMS
-1-
Outline
?WhatisMEMS?
?Fabrications
?CaseStudy
-2-
ThenameofMicroSystems
?US:MEMS(MicroElectroMechanical
Systems)
?Japan:Micromachines
?Europe:MST(MicroSystemTechnology)
?Scaleofdevice:roughlyfrom1μm-1mm.
-3-
BenefitsofMEMS
?Miniaturized:savematerials,savepower,faster
timeresponse,betterperformance
?Integration:integratedwithICandothersystems,
reducesystemsizecost
?Batchfabrication:cheap,disposable.Most
importantdrivingforce
?Approachthesmallworldwecannotbefore,like
miniaturizedbiomedicalsystem.Catheter,etc...
-4-
KnowledgeBasis
OperationScalingFabricationPackage
PrinciplesEffectProcessIntegration
PhysicsScalinglawMicroICICMEMS
ChemistryFabricationPackage
Biologyetc.Process
-5-
Scaling
MEMS
-6-
ApplicationsofMEMS
Transducer