基本信息
文件名称:课件案例成果TC 45nm GS 7X2Z AL RDL V2D0 CMP STI Process SPICE Check Form:Line-to-Line Capacitance Model with Conduc Layer Thickness and Width Space Variations.pdf
文件大小:271.8 KB
总页数:6 页
更新时间:2025-08-11
总字数:约4.9万字
文档摘要
SecurityB-TSMCRestrictedSecret
SPICECheckForm:Line-to-LineCapacitanceModelforCMPSTIProcess
Program:45nmGS1P1